http://quartz-ir-heat-pro.com/zh/tags/%E7%B2%BE%E5%BA%A6/ Recent content in 精度 on Pro Quartz Infrared Heating Hugo zh Mon, 01 Jun 2026 13:05:08 +0800 http://quartz-ir-heat-pro.com/zh/posts/precision-ir-sensor-for-wafer/ Mon, 01 Jun 2026 13:05:08 +0800 http://quartz-ir-heat-pro.com/zh/posts/precision-ir-sensor-for-wafer/ <p><img src="http://quartz-ir-heat-pro.com/images/c4487c91a5d0bd93963bf8b3a19ba704.png" alt="用于晶圆的高精度红外传感器"></p> <p>在线上，晶圆以极其有限的热预算进入烘烤站。软烘烤设定光刻胶轮廓。硬烘烤锁定图案的保真度。温度漂移几十分之一摄氏度，无法察觉的热点，都会导致线宽尺寸（CD）偏移。保护膜应力变化。缺陷漏检。翌日的良率评审往往指向温度不均匀性。</p>