http://quartz-ir-heat-pro.com/en/tags/precision/ Recent content in Precision on Pro Quartz Infrared Heating Hugo en-us Mon, 01 Jun 2026 13:05:08 +0800 http://quartz-ir-heat-pro.com/en/posts/precision-ir-sensor-for-wafer/ Mon, 01 Jun 2026 13:05:08 +0800 http://quartz-ir-heat-pro.com/en/posts/precision-ir-sensor-for-wafer/ <p><img src="http://quartz-ir-heat-pro.com/images/c4487c91a5d0bd93963bf8b3a19ba704.png" alt="Precision IR sensor for wafer"></p> <p>On the line, the wafer hits the bake station with a razor-thin thermal budget. Soft bake sets the photoresist profile. Hard bake locks in pattern fidelity. A few tenths of a degree drift, a hotspot you can’t see, and your CDs start to wander. Pellicle stress shifts. Defects slip past inspection. Then the next morning, the yield review points straight at temperature non-uniformity. We built a precision IR sensor for the wafer to cut that chain reaction off at the source. It reads the wafer <a href="https://o-yate.net">surface</a> temperature directly, in situ, with the resolution and repeatability lithography bake steps demand. No guessing from chamber walls. No extrapolating off thermocouples that see the heater, not the resist. Just a clean, stable signal you can count on cycle after cycle.</p>