Compact infrared dryer for IC

Sun, 28 Jun 2026 05:22:09 +0800

On the litho floor, a soft bake that drifts even half a degree can throw your critical dimensions and cost you a full wafer lot. You don’t need heat that “feels close.” You need heat that hits spec, shift after shift. What we built, and why it matters We packed this compact infrared dryer with medium-wave NIR emitters and a quartz-based thermal stack so we can hold ±0.1°C uniformity across the wafer. Closed-loop control keeps temperature repeatability tight, so soft bake and hard bake stay inside the photoresist thermal budget. It’s cleanroom-compatible, Class 1–100, with low-outgassing materials and a laminar airflow path that keeps particle generation at zero. In practice, that means the dryer doesn’t add defects. It just delivers predictable bakes. Why it fits the fab reality In IC fabrication, this unit sits right where speed meets precision. It hits setpoint fast, runs soft and hard bake profiles with narrow margins, and holds uniformity through long lots. The payoff is consistent CD control, fewer reworks, and yields that stay stable. Because it responds quickly and heats only what needs heating, energy use comes down. And the footprint is small enough to drop into tight track layouts without fighting for floor space. What you need to make it run right Integration is straightforward, but you do need a dedicated power circuit and clean, dry compressed air to keep the purge and exhaust path healthy. Plan a short commissioning run to tune the recipe to your photoresist stack. Once it’s aligned, the dryer will run 24/7 with routine calibration and keep delivering the same thermal profile, batch after batch.

Compact on Pro Quartz Infrared Heating

Compact infrared dryer for IC